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Vertical Diffusion Furnace

○ Product Details

1. Equipment Overview:

The vertical diffusion furnace equipment can be applied in integrated circuits, discrete components, POWER, MEMS, and other fields, suitable for oxidation, diffusion, GPP, annealing, and alloy processes on 6-12 inch silicon wafers.

The diffusion process involves inserting impurity elements into the silicon substrate at high temperatures using thermal diffusion principles to achieve a specific concentration distribution, altering the material's electrical properties and forming semiconductor device structures. It can be used to create PN junctions or components such as resistors, capacitors, diodes, and transistors in integrated circuits.

This equipment system is a vertical single-chamber furnace with highly automated process control. It mainly includes the main unit, power cabinet, gas cabinet, heating system, and transmission system.

 

2. Equipment Parameter Types:

Equipment Performance Indicators

1

Operation Mode

Vertical

2

Number of Tubes

1 Tube

3

Processed Wafer Size

6-12 inches

4

Applicable Process

Diffusion (phosphorus diffusion, boron diffusion), oxidation, annealing, alloying, aluminum pre-deposition

5

Temperature calibration function

Features automatic temperature zone calibration with pre-set bias values for rapid heating in designated zones

6

Temperature Control Mode

Spike Temperature Control + Profile Cascade Temperature Control

7

Control System Structure

Integrated Industrial Computer + PLC

8

Alarm Protection:

Features over-temperature alarm, broken thermocouple alarm, gas interlock, gas slow start, etc.


3. Main Features and Advantages of the Equipment

1★ Powerful operation capabilities, Windows interface, display screen operation, allowing users to conveniently modify process control parameters and monitor various process statuses in real-time; equipped with fault self-diagnosis software, significantly reducing maintenance time;

2★ Reliable industrial computer + PLC mode for fully automated control of furnace temperature, boat movement, gas flow, and valves, achieving complete process automation;

3★ Programs support manual/automatic operation; after power failure or mid-process interruption, restarting allows temperature ramp-up based on the process, saving process time;

4★ Multiple process pipelines available for user convenience;

5★ Boat movement control uses high-speed pulse closed-loop control to avoid step loss and vibration during operation. After completing a cycle, the boat automatically calibrates its position to prevent positioning deviation;

6★ Precise gas flow control with analog signal closed-loop control, strong/weak electrical separation, standard bus for data exchange to enhance anti-interference capability and ensure data security; gas valves feature soft-start functionality;

7★ Multiple alarm and safety protection functions;
8★ Automatic adjustment of constant temperature zones, cascade control, accurately controlling the actual process temperature of reaction tubes;

○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 50 patents.

○ Company Certifications

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